Introduction to Microfabrication

510L3vKl3KL._SY291_BO1,204,203,200_QL40_ Author Sami Franssila
Isbn 9780470851050
File size 6.62MB
Year 2004
Pages 422
Language English
File format PDF
Category Physics

Book Description:

Microfabrication is the key technology behind integrated circuits, microsensors, photonic crystals, ink jet printers, solar cells and flat panel displays. Microsystems can be complex, but the basic microstructures and processes of microfabrication are fairly simple. Introduction to Microfabrication shows how the common microfabrication concepts can be applied over and over again to create devices with a wide variety of structures and functions.

* A comprehensive presentation of basic fabrication processes
* An emphasis on materials and microstructures, rather than device physics
* In-depth discussion on process integration showing how processes, materials and devices interact
* A wealth of examples of both conceptual and real devices
Introduction to Microfabrication includes 250 homework problems for students to familiarise themselves with micro-scale materials, dimensions, measurements, costs and scaling trends. Both research and manufacturing topics are covered, with an emphasis on silicon, which is the workhorse of microfabrication.

This book will serve as an excellent first text for electrical engineers, chemists, physicists and materials scientists who wish to learn about microstructures and microfabrication techniques, whether in MEMS, microelectronics or emerging applications.



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